Products

YAMARI CERATHERMO®

By insulating the thermocouple wire with a thin ceramic film, this thermocouple eliminates the need for insulation tubes and protective tubes, which have difficulties in workability, and makes it possible to reduce the diameter and weight.

“YAMARI CERATHERMO” and “ヤマリセラサーモ” are registered trademarks of YAMARI INDUSTRIES, LIMITED (registered trademark No. 4582780).

Features

Easy to handle
No breakage at joints in insulators.
Space Saving
Virtually same diameter as bare wire.
Lightweight
Virtually same weight as bare wire.
High Flexibility
No insulators are necessary.
Low out gassing
Usable in super vacuum atmosphere.

Applications

Semiconductor processing equipment
- Measurement of wafer temperature distribution
Vacuum equipment
- Measurement of substrate temperature in various vapor deposition equipment and sputtering equipment
- Temperature measurement in the analyzer
CVD equipment, Heat treatment furnace, etc.
- Temperature measurement in precision kilns and precision synthesis furnaces

Specifications

Type of Thermocouple	K
Diameter (typical example) (mm)	φ0.1　φ0.2　φ0.32

* We will also undertake hot junction processing if necessary.
* Correct electromotive force may not be generated if ceramic film is not removed during hot contact processing and terminal processing.

YAMARI CERATHERMO® with hot contact processing

* L dimensions are available as desired dimensions.

Structure of YAMARI CERATHERMO®

Please click here for inquiry about YAMARI CERATHERMO^®.

YAMARI CERATHERMO®

Features

Applications

Specifications

List of Special products