Products

Radiation thermometer IS12-Si

Product name

Radiation thermometer for measuring silicon wafer temperature

Model number

IS12-Si

IS12-Si is a full digital radiation thermometer for silicon wafers.
The fastest 10msec for fast-response and short-wavelength detection enable high-precision measurement of the temperatureof silicon wafers.

Usage

- A radiation thermometer designed specifically for silicon wafers.

Features

- Radiation thermometer dedicated to silicon wafers
- It can respond quickly (maximum 10msec), so it is suitable for measuring the temperature of a sample with severe temperature change or a sample moving at high speed. Response-speed can be set up to 10s.
- Small spot measurement is realized, so even small samples can be measured.
- With six fixed focus lenses and three movable focus lenses, accurate temperature measurement is possible.
- Scales high accuracy and stability free temperature range in a fully digital circuit.
- It has a built-in maximum value holding circuit, so it is also suitable for measuring moving objects.
- You can choose between a fixed focus lens and a movable focus lens.
- Data-recording and parameter setting can be performed using the dedicated measurement software (for Windows) provided as a standard-attached product.
- The focus spot in the direct-view viewfinder allows you to accurately locate the position of the measurement target.
  Laser pilot lights for more accurate positioning are also optionally available.

Specifications

Temperature range	400 ～ 1300℃, 400 ～ 900℃, 350 ～ 1000℃, 500 ～ 1800℃
Detection wavelength	Narrow wavelength range of near infrared (The optimum wavelength for temperature measurement of silicon wafers is selected.)

・The interface can switch between RS485 that can be connected to RS232 or busses.