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■ Profile Thermocuples for Diffusion Systems
- Features - ◆ Accuracy Class2(Class 1 is also available as an option.) Calibration certificate shall be issued at temperature range and interval requested. ◆ Stability The construction and material that enhance stability shall be applied. E.g.・Longer insulating tube capable of reducing evaporation of rhodium element. ・Alumina insulating tube containing low ferrous impurities. ・Quartz protecting tube containing low alkali or high purity silicon carbide protecting tube. ◆ Cleanness The profile thermocouples shall be assembled in clean room.(Cleanliness:Class 5) ◆ Application In addition to basic structure,various connecting methods like connection to lead wire are also applicable. ■ Wafer Sensor
■ Waterwall Tubeskin Thermocouple
FOR MONITORING TEMPERATURE PROFILE,THE SPRING CLIP ENSURES THE FIRM CONTACT OF EACH SENSING TIP AGAINST THE INNER WALL OF THE THERMOWELL.
- Features -
■ The bimetal type Multipoint Thermocouple
- Features -
■ Special Thermocouple for SRU Model:HT-270
■ Hi-Reliability Tube Skin Thermocouple Thicker walled large diameter cable ensure long life.
■ Thermocouple for Blast Furnace
■ Polyimide-Insulated Thermocouple
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copyright (C) 2000 Yamari Industries, Limited
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